Auto Probe Station
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UF200SA Auto Probe Station
|
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| 적용분야 |
200mm |
| 제조사 |
AccreTech |
| Overall Accuracy |
Within 4 um |
| Wafer Size |
5",6",8" |
| X/Y axis |
Probing
Area |
±120
mm |
| Maximum Speed |
200
mm/s |
| Z axis |
Full
Stroke |
69
mm |
| Maximum Speed |
35ms/0.5mm
Stroke |
| Θ axis |
Rotation
Range |
±5
deg. |
| Fine Alignment |
CCD
ITV Image Processing |
| Loader |
Cassette
Mounts |
1
(2nd cassette with option) |
| Wafer Handling |
Robot
Arm / Backside Holding |
| Hard Disk |
3.5"
4.5GMB (1 unit standard) |
| Floppy Disk |
3.5"
2HD (1.4M) / 2DD (1 unit standard) |
| Display |
10.4"
TFT Color LCD |
| Power Consumption |
AC100V±10V
50/60Hz 1.5 kVA |
| Air Supply |
Source
Pressure |
0.4
Mpa or more |
| Consumption |
Approximately
0.1 liters / wafer |
| Vacuum Supply |
Less
than -50 kPa, 30 liter /minute |
| Dimensions |
1092(W)×1100(D)×887(H)
mm |
| Weight |
800
kg (Standard) |
