Auto Probe Station
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P-8XL Auto Probe Station
|
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| 적용분야 |
200mm |
| 제조사 |
TEL |
| Total Accuracy |
4um |
| Wafer
Spec |
Size |
4,5,6 and 8 inch |
| Thickness |
300 to 1000um |
| Die Size |
500 to 76000um |
| X-Y
Stage |
XY Probing Area |
X:±118mm Y:+112mm,-125mm |
| Accuracy |
±2um |
| Speed |
200mm/s |
| Z
Stage |
Z Stroke |
95mm |
| Contact Range |
65.8 ~93.3mm |
| Accuracy |
±2um |
| Theta
Mechanism |
Roatation |
-7.5~+14.5° |
| |
Accuracy |
±0.5um |
| Chuck Top |
Planarity |
10um |
| Alignment |
Pattern Matching
(MAGIC) |
| Interface |
GPIB |
| Loader |
Auto Loading(5,6 and
8 inch) |
| Dimensions |
1090(W)×1065(D)
x 930(H) |
| Weight |
750
Kg |
